Plasma-Induced Surface Modification of Sapphire and Its Influence on Graphene Grown by Plasma-Enhanced Chemical Vapour Deposition

In this work, we study the influence of the different surface terminations of c-plane sapphire substrates on the synthesis of graphene via plasma-enhanced chemical vapor deposition. The different terminations of the sapphire surface are controlled by a plasma process. A design of experiments procedu...

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Detalles Bibliográficos
Autores principales: Lozano, Miguel Sinusia, Bernat-Montoya, Ignacio, Angelova, Todora Ivanova, Mojena, Alberto Boscá, Díaz-Fernández, Francisco J., Kovylina, Miroslavna, Martínez, Alejandro, Cienfuegos, Elena Pinilla, Gómez, Víctor J.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10343755/
https://www.ncbi.nlm.nih.gov/pubmed/37446468
http://dx.doi.org/10.3390/nano13131952

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