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Terahertz Detectors Using Microelectromechanical System Resonators

The doubly clamped microelectromechanical system (MEMS) beam resonators exhibit extremely high sensitivity to tiny changes in the resonance frequency owing to their high quality (Q-) factors, even at room temperature. Such a sensitive frequency-shift scheme is very attractive for fast and highly sen...

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Detalles Bibliográficos
Autores principales: Li, Chao, Zhang, Ya, Hirakawa, Kazuhiko
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10346823/
https://www.ncbi.nlm.nih.gov/pubmed/37447789
http://dx.doi.org/10.3390/s23135938
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author Li, Chao
Zhang, Ya
Hirakawa, Kazuhiko
author_facet Li, Chao
Zhang, Ya
Hirakawa, Kazuhiko
author_sort Li, Chao
collection PubMed
description The doubly clamped microelectromechanical system (MEMS) beam resonators exhibit extremely high sensitivity to tiny changes in the resonance frequency owing to their high quality (Q-) factors, even at room temperature. Such a sensitive frequency-shift scheme is very attractive for fast and highly sensitive terahertz (THz) detection. The MEMS resonator absorbs THz radiation and induces a temperature rise, leading to a shift in its resonance frequency. This frequency shift is proportional to the amount of THz radiation absorbed by the resonator and can be detected and quantified, thereby allowing the THz radiation to be measured. In this review, we present an overview of the THz bolometer based on the doubly clamped MEMS beam resonators in the aspects of working principle, readout, detection speed, sensitivity, and attempts at improving the performance. This allows one to have a comprehensive view of such a novel THz detector.
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spelling pubmed-103468232023-07-15 Terahertz Detectors Using Microelectromechanical System Resonators Li, Chao Zhang, Ya Hirakawa, Kazuhiko Sensors (Basel) Review The doubly clamped microelectromechanical system (MEMS) beam resonators exhibit extremely high sensitivity to tiny changes in the resonance frequency owing to their high quality (Q-) factors, even at room temperature. Such a sensitive frequency-shift scheme is very attractive for fast and highly sensitive terahertz (THz) detection. The MEMS resonator absorbs THz radiation and induces a temperature rise, leading to a shift in its resonance frequency. This frequency shift is proportional to the amount of THz radiation absorbed by the resonator and can be detected and quantified, thereby allowing the THz radiation to be measured. In this review, we present an overview of the THz bolometer based on the doubly clamped MEMS beam resonators in the aspects of working principle, readout, detection speed, sensitivity, and attempts at improving the performance. This allows one to have a comprehensive view of such a novel THz detector. MDPI 2023-06-26 /pmc/articles/PMC10346823/ /pubmed/37447789 http://dx.doi.org/10.3390/s23135938 Text en © 2023 by the authors. https://creativecommons.org/licenses/by/4.0/Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/).
spellingShingle Review
Li, Chao
Zhang, Ya
Hirakawa, Kazuhiko
Terahertz Detectors Using Microelectromechanical System Resonators
title Terahertz Detectors Using Microelectromechanical System Resonators
title_full Terahertz Detectors Using Microelectromechanical System Resonators
title_fullStr Terahertz Detectors Using Microelectromechanical System Resonators
title_full_unstemmed Terahertz Detectors Using Microelectromechanical System Resonators
title_short Terahertz Detectors Using Microelectromechanical System Resonators
title_sort terahertz detectors using microelectromechanical system resonators
topic Review
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10346823/
https://www.ncbi.nlm.nih.gov/pubmed/37447789
http://dx.doi.org/10.3390/s23135938
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