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Terahertz Detectors Using Microelectromechanical System Resonators

The doubly clamped microelectromechanical system (MEMS) beam resonators exhibit extremely high sensitivity to tiny changes in the resonance frequency owing to their high quality (Q-) factors, even at room temperature. Such a sensitive frequency-shift scheme is very attractive for fast and highly sen...

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Detalles Bibliográficos
Autores principales:	Li, Chao, Zhang, Ya, Hirakawa, Kazuhiko
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2023
Materias:	Review
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10346823/ https://www.ncbi.nlm.nih.gov/pubmed/37447789 http://dx.doi.org/10.3390/s23135938

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