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Multielectrode Arrays at Wafer-Level for Miniaturized Sensors Applications: Electrochemical Growth of Ag/AgCl Reference Electrodes

In this study, a range of miniaturized Ag/AgCl reference electrodes with various layouts were successfully fabricated on wafer-level silicon-based substrates with metallic intermediate layers by precisely controlling the electrochemical deposition of Ag, followed by electrochemical chlorination of t...

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Detalles Bibliográficos
Autores principales:	Wu, Haosheng, Krause, Robert, Gogoi, Eshanee, Reck, André, Graf, Alexander, Wislicenus, Marcus, Hild, Olaf R., Guhl, Conrad
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2023
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10347207/ https://www.ncbi.nlm.nih.gov/pubmed/37447979 http://dx.doi.org/10.3390/s23136130

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