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Precise determination of Young’s modulus of amorphous CuZr/nanocrystalline Cu multilayer via nanoindentation
Extracting mechanical data of thin films on rigid substrates using nanoindentation is compromised by the mechanical properties of underlying substrates, which may falsify the obtained results. With ongoing miniaturization, the substrate influence becomes more pronounced. In this study we present an...
| Autores principales: | , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Springer International Publishing
2023
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| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10356677/ https://www.ncbi.nlm.nih.gov/pubmed/37485024 http://dx.doi.org/10.1557/s43578-023-01057-y |