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Etching Kinetics of Nanodiamond Seeds in the Early Stages of CVD Diamond Growth

[Image: see text] We present an experimental study on the etching of detonation nanodiamond (DND) seeds during typical microwave chemical vapor deposition (MWCVD) conditions leading to ultra-thin diamond film formation, which is fundamental for many technological applications. The temporal evolution...

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Autores principales: Salerno, Raffaella, Pede, Biagio, Mastellone, Matteo, Serpente, Valerio, Valentini, Veronica, Bellucci, Alessandro, Trucchi, Daniele M., Domenici, Fabio, Tomellini, Massimo, Polini, Riccardo
Formato: Online Artículo Texto
Lenguaje:English
Publicado: American Chemical Society 2023
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10357433/
https://www.ncbi.nlm.nih.gov/pubmed/37483211
http://dx.doi.org/10.1021/acsomega.3c03080
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author Salerno, Raffaella
Pede, Biagio
Mastellone, Matteo
Serpente, Valerio
Valentini, Veronica
Bellucci, Alessandro
Trucchi, Daniele M.
Domenici, Fabio
Tomellini, Massimo
Polini, Riccardo
author_facet Salerno, Raffaella
Pede, Biagio
Mastellone, Matteo
Serpente, Valerio
Valentini, Veronica
Bellucci, Alessandro
Trucchi, Daniele M.
Domenici, Fabio
Tomellini, Massimo
Polini, Riccardo
author_sort Salerno, Raffaella
collection PubMed
description [Image: see text] We present an experimental study on the etching of detonation nanodiamond (DND) seeds during typical microwave chemical vapor deposition (MWCVD) conditions leading to ultra-thin diamond film formation, which is fundamental for many technological applications. The temporal evolution of the surface density of seeds on the Si(100) substrate has been assessed by scanning electron microscopy (SEM). The resulting kinetics have been explained in the framework of a model based on the effect of the particle size, according to the Young–Laplace equation, on both chemical potential of carbon atoms in DND and activation energy of the reaction with atomic hydrogen. The model describes the experimental kinetics of seeds’ disappearance by assuming that nanodiamond particles with a size smaller than a “critical radius,” r*, are etched away while those greater than r* can grow. Finally, the model allows to estimate the rate coefficients for growth and etching from the experimental kinetics.
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spelling pubmed-103574332023-07-21 Etching Kinetics of Nanodiamond Seeds in the Early Stages of CVD Diamond Growth Salerno, Raffaella Pede, Biagio Mastellone, Matteo Serpente, Valerio Valentini, Veronica Bellucci, Alessandro Trucchi, Daniele M. Domenici, Fabio Tomellini, Massimo Polini, Riccardo ACS Omega [Image: see text] We present an experimental study on the etching of detonation nanodiamond (DND) seeds during typical microwave chemical vapor deposition (MWCVD) conditions leading to ultra-thin diamond film formation, which is fundamental for many technological applications. The temporal evolution of the surface density of seeds on the Si(100) substrate has been assessed by scanning electron microscopy (SEM). The resulting kinetics have been explained in the framework of a model based on the effect of the particle size, according to the Young–Laplace equation, on both chemical potential of carbon atoms in DND and activation energy of the reaction with atomic hydrogen. The model describes the experimental kinetics of seeds’ disappearance by assuming that nanodiamond particles with a size smaller than a “critical radius,” r*, are etched away while those greater than r* can grow. Finally, the model allows to estimate the rate coefficients for growth and etching from the experimental kinetics. American Chemical Society 2023-07-03 /pmc/articles/PMC10357433/ /pubmed/37483211 http://dx.doi.org/10.1021/acsomega.3c03080 Text en © 2023 The Authors. Published by American Chemical Society https://creativecommons.org/licenses/by-nc-nd/4.0/Permits non-commercial access and re-use, provided that author attribution and integrity are maintained; but does not permit creation of adaptations or other derivative works (https://creativecommons.org/licenses/by-nc-nd/4.0/).
spellingShingle Salerno, Raffaella
Pede, Biagio
Mastellone, Matteo
Serpente, Valerio
Valentini, Veronica
Bellucci, Alessandro
Trucchi, Daniele M.
Domenici, Fabio
Tomellini, Massimo
Polini, Riccardo
Etching Kinetics of Nanodiamond Seeds in the Early Stages of CVD Diamond Growth
title Etching Kinetics of Nanodiamond Seeds in the Early Stages of CVD Diamond Growth
title_full Etching Kinetics of Nanodiamond Seeds in the Early Stages of CVD Diamond Growth
title_fullStr Etching Kinetics of Nanodiamond Seeds in the Early Stages of CVD Diamond Growth
title_full_unstemmed Etching Kinetics of Nanodiamond Seeds in the Early Stages of CVD Diamond Growth
title_short Etching Kinetics of Nanodiamond Seeds in the Early Stages of CVD Diamond Growth
title_sort etching kinetics of nanodiamond seeds in the early stages of cvd diamond growth
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10357433/
https://www.ncbi.nlm.nih.gov/pubmed/37483211
http://dx.doi.org/10.1021/acsomega.3c03080
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