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Fabrication of Al/AlO(x)/Al junctions with high uniformity and stability on sapphire substrates

Tantalum and aluminum on sapphire are widely used platforms for qubits of long coherent time. As quantum chips scale up, the number of Josephson junctions on sapphire increases. Thus, both the uniformity and stability of the junctions are crucial to quantum devices, such as scalable superconducting...

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Detalles Bibliográficos
Autores principales:	Zheng, Yuzhen, Li, Shuming, Ding, Zengqian, Xiong, Kanglin, Feng, Jiagui, Yang, Hui
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	Nature Publishing Group UK 2023
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10363147/ https://www.ncbi.nlm.nih.gov/pubmed/37481599 http://dx.doi.org/10.1038/s41598-023-39052-2

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