A force-compensated compliant MEMS-amplifier with electrostatic anti-springs

In this paper, an electrostatic compliant mechanical amplifier intended for force-compensated displacement amplification in MEMS sensor applications is described. Usually, mechanical transformers that enhance a small input displacement into a large output displacement generate large forces at the in...

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Detalles Bibliográficos
Autores principales: Schmitt, Philip, Hoffmann, Martin
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10367442/
https://www.ncbi.nlm.nih.gov/pubmed/37492615
http://dx.doi.org/10.1038/s41378-023-00557-5

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10367442/
https://www.ncbi.nlm.nih.gov/pubmed/37492615
http://dx.doi.org/10.1038/s41378-023-00557-5

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