Cargando…
A force-compensated compliant MEMS-amplifier with electrostatic anti-springs
In this paper, an electrostatic compliant mechanical amplifier intended for force-compensated displacement amplification in MEMS sensor applications is described. Usually, mechanical transformers that enhance a small input displacement into a large output displacement generate large forces at the in...
| Autores principales: | , |
|---|---|
| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Nature Publishing Group UK
2023
|
| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10367442/ https://www.ncbi.nlm.nih.gov/pubmed/37492615 http://dx.doi.org/10.1038/s41378-023-00557-5 |