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Characterization of Structural, Optical, Corrosion, and Mechanical Properties of HfO(2) Thin Films Deposited Using Pulsed DC Magnetron Sputtering

Various properties of HfO(2), such as hardness, corrosion, or electrical resistance, depend on the method and the conditions of deposition. In this work, a thorough comparison of scarcely investigated mechanical properties of HfO(2) thin films deposited with different conditions of reactive magnetro...

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Detalles Bibliográficos
Autores principales:	Mańkowska, Ewa, Mazur, Michał, Kalisz, Małgorzata, Grobelny, Marcin, Domaradzki, Jarosław, Wojcieszak, Damian
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2023
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10381844/ https://www.ncbi.nlm.nih.gov/pubmed/37512279 http://dx.doi.org/10.3390/ma16145005

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