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Thermal Flow Meter with Integrated Thermal Conductivity Sensor

This paper presents a novel gas-independent thermal flow sensor chip featuring three calorimetric flow sensors for measuring flow profile and direction within a tube, along with a single-wire flow independent thermal conductivity sensor capable of identifying the gas type through a simple DC voltage...

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Detalles Bibliográficos
Autores principales:	Azadi Kenari, Shirin, Wiegerink, Remco J., Veltkamp, Henk-Willem, Sanders, Remco G. P., Lötters, Joost C.
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2023
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10383380/ https://www.ncbi.nlm.nih.gov/pubmed/37512591 http://dx.doi.org/10.3390/mi14071280

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