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Evolution of Cu-In Catalyst Nanoparticles under Hydrogen Plasma Treatment and Silicon Nanowire Growth Conditions

We report silicon nanowire (SiNW) growth with a novel Cu-In bimetallic catalyst using a plasma-enhanced chemical vapor deposition (PECVD) method. We study the structure of the catalyst nanoparticles (NPs) throughout a two-step process that includes a hydrogen plasma pre-treatment at 200 °C and the S...

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Detalles Bibliográficos
Autores principales:	Wang, Weixi, Ngo, Éric, Bulkin, Pavel, Zhang, Zhengyu, Foldyna, Martin, Roca i Cabarrocas, Pere, Johnson, Erik V., Maurice, Jean-Luc
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2023
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10384329/ https://www.ncbi.nlm.nih.gov/pubmed/37513072 http://dx.doi.org/10.3390/nano13142061

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