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An Effect of Layered Auxiliary Cathode on Thickness Uniformity in Micro Electroforming Process
Thickness nonuniformity is a bottleneck in the micro electroforming process of micro-metal devices. In this paper, a new method of fabricating a layered auxiliary cathode is proposed to improve the thickness uniformity of a micro-electroforming layer. In order to analyze the general applicability of...
| Autores principales: | , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2023
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10385224/ https://www.ncbi.nlm.nih.gov/pubmed/37512617 http://dx.doi.org/10.3390/mi14071307 |