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A Scale Factor Calibration Method for MEMS Resonant Accelerometers Based on Virtual Accelerations

This paper presents a scale factor calibration method based on virtual accelerations generated by electrostatic force. This method uses a series of voltage signals to simulate the inertial forces caused by the acceleration input, rather than frequent and laborious calibrations with high-precision in...

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Detalles Bibliográficos
Autores principales:	Zhai, Zhaoyang, Xiong, Xingyin, Ma, Liangbo, Wang, Zheng, Wang, Kunfeng, Wang, Bowen, Zhang, Mingjiang, Zou, Xudong
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2023
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10385527/ https://www.ncbi.nlm.nih.gov/pubmed/37512719 http://dx.doi.org/10.3390/mi14071408

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