Predictive Maintenance of Pins in the ECD Equipment for Cu Deposition in the Semiconductor Industry

Nowadays, Predictive Maintenance is a mandatory tool to reduce the cost of production in the semiconductor industry. This paper considers as a case study a critical part of the electrochemical deposition system, namely, the four Pins that hold a wafer inside a chamber. The aim of the study is to rep...

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Detalles Bibliográficos
Autores principales: Amato, Umberto, Antoniadis, Anestis, De Feis, Italia, Fazio, Domenico, Genua, Caterina, Gijbels, Irène, Granata, Donatella, La Magna, Antonino, Pagano, Daniele, Tochino, Gabriele, Vasquez, Patrizia
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10385765/
https://www.ncbi.nlm.nih.gov/pubmed/37514544
http://dx.doi.org/10.3390/s23146249

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