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Silicon-based mid infrared on-chip gas sensor using Fano resonance of coupled plasmonic microcavities

Sensing in the mid infrared spectral range is highly desirable for the detection and monitoring of different gases. We hereby propose a CMOS compatible silicon-based sensor that operates at (3.5–10 μm) within the mid infrared range. The silicon material is doped to the level that shifts its plasmoni...

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Detalles Bibliográficos
Autores principales: Sherif, Sherif M., Swillam, Mohamed A.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2023
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10387087/
https://www.ncbi.nlm.nih.gov/pubmed/37516742
http://dx.doi.org/10.1038/s41598-023-38926-9