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Silicon-based mid infrared on-chip gas sensor using Fano resonance of coupled plasmonic microcavities
Sensing in the mid infrared spectral range is highly desirable for the detection and monitoring of different gases. We hereby propose a CMOS compatible silicon-based sensor that operates at (3.5–10 μm) within the mid infrared range. The silicon material is doped to the level that shifts its plasmoni...
| Autores principales: | , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
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Nature Publishing Group UK
2023
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| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10387087/ https://www.ncbi.nlm.nih.gov/pubmed/37516742 http://dx.doi.org/10.1038/s41598-023-38926-9 |