Analysis of the Diffusion in a Multilayer Structure under a Constant Heating Rate: The Calculation of Activation Energy from the In Situ Neutron Reflectometry Measurement

[Image: see text] Understanding mass transport in micro- and nanostructures is of paramount importance in improving the performance and reliability of the micro- and nanostructures. In this work, we solve the diffusion problem in a multilayer structure with periodic conditions under a constant heating rate via a Fourier series. Analytical relation is established between the coefficients of eigenfunctions and the intensity of X-ray or neutron Bragg peak. The logarithm of temporal variation of the intensity of X-ray or neutron Bragg peak is a linear function of the nominal diffusion time, with the nominal diffusion time being dependent on the heating rate. This linear relation is validated by experimental data. The Taylor series expansion of the linear relation to the first order of the diffusion time yields an approximately linear relation between the logarithm of temporal variation of the intensity of X-ray or neutron peak and the diffusion time for small diffusion times, which can be likely used to calculate the activation energy for the diffusion in a multilayer structure. The validation of such an approach is subjected to the fact that the characteristic time for heat conduction is much less than the characteristic time for the ramp heating as well as the characteristic time for diffusion.