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High-quality superconducting α-Ta film sputtered on the heated silicon substrate

Intrigued by the discovery of the long lifetime in the α-Ta/Al(2)O(3)-based Transmon qubit, researchers recently found α-Ta film is a promising platform for fabricating multi-qubits with long coherence time. To meet the requirements for integrating superconducting quantum circuits, the ideal method...

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Autores principales: Wu, Yanfu, Ding, Zengqian, Xiong, Kanglin, Feng, Jiagui
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2023
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10406942/
https://www.ncbi.nlm.nih.gov/pubmed/37550325
http://dx.doi.org/10.1038/s41598-023-39420-y
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author Wu, Yanfu
Ding, Zengqian
Xiong, Kanglin
Feng, Jiagui
author_facet Wu, Yanfu
Ding, Zengqian
Xiong, Kanglin
Feng, Jiagui
author_sort Wu, Yanfu
collection PubMed
description Intrigued by the discovery of the long lifetime in the α-Ta/Al(2)O(3)-based Transmon qubit, researchers recently found α-Ta film is a promising platform for fabricating multi-qubits with long coherence time. To meet the requirements for integrating superconducting quantum circuits, the ideal method is to grow α-Ta film on a silicon substrate compatible with industrial manufacturing. Here we report the α-Ta film sputter-grown on Si (100) with a low-loss superconducting TiN(x) buffer layer. The α-Ta film with a large growth temperature window has a good crystalline character. The superconducting critical transition temperature (T(c)) and residual resistivity ratio (RRR) in the α-Ta film grown at 500 °C are higher than that in the α-Ta film grown at room temperature (RT). These results provide crucial experimental clues toward understanding the connection between the superconductivity and the materials' properties in the α-Ta film and open a new route for producing a high-quality α-Ta film on silicon substrate for future industrial superconducting quantum computers.
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spelling pubmed-104069422023-08-09 High-quality superconducting α-Ta film sputtered on the heated silicon substrate Wu, Yanfu Ding, Zengqian Xiong, Kanglin Feng, Jiagui Sci Rep Article Intrigued by the discovery of the long lifetime in the α-Ta/Al(2)O(3)-based Transmon qubit, researchers recently found α-Ta film is a promising platform for fabricating multi-qubits with long coherence time. To meet the requirements for integrating superconducting quantum circuits, the ideal method is to grow α-Ta film on a silicon substrate compatible with industrial manufacturing. Here we report the α-Ta film sputter-grown on Si (100) with a low-loss superconducting TiN(x) buffer layer. The α-Ta film with a large growth temperature window has a good crystalline character. The superconducting critical transition temperature (T(c)) and residual resistivity ratio (RRR) in the α-Ta film grown at 500 °C are higher than that in the α-Ta film grown at room temperature (RT). These results provide crucial experimental clues toward understanding the connection between the superconductivity and the materials' properties in the α-Ta film and open a new route for producing a high-quality α-Ta film on silicon substrate for future industrial superconducting quantum computers. Nature Publishing Group UK 2023-08-07 /pmc/articles/PMC10406942/ /pubmed/37550325 http://dx.doi.org/10.1038/s41598-023-39420-y Text en © The Author(s) 2023 https://creativecommons.org/licenses/by/4.0/Open Access This article is licensed under a Creative Commons Attribution 4.0 International License, which permits use, sharing, adaptation, distribution and reproduction in any medium or format, as long as you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons licence, and indicate if changes were made. The images or other third party material in this article are included in the article's Creative Commons licence, unless indicated otherwise in a credit line to the material. If material is not included in the article's Creative Commons licence and your intended use is not permitted by statutory regulation or exceeds the permitted use, you will need to obtain permission directly from the copyright holder. To view a copy of this licence, visit http://creativecommons.org/licenses/by/4.0/ (https://creativecommons.org/licenses/by/4.0/) .
spellingShingle Article
Wu, Yanfu
Ding, Zengqian
Xiong, Kanglin
Feng, Jiagui
High-quality superconducting α-Ta film sputtered on the heated silicon substrate
title High-quality superconducting α-Ta film sputtered on the heated silicon substrate
title_full High-quality superconducting α-Ta film sputtered on the heated silicon substrate
title_fullStr High-quality superconducting α-Ta film sputtered on the heated silicon substrate
title_full_unstemmed High-quality superconducting α-Ta film sputtered on the heated silicon substrate
title_short High-quality superconducting α-Ta film sputtered on the heated silicon substrate
title_sort high-quality superconducting α-ta film sputtered on the heated silicon substrate
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10406942/
https://www.ncbi.nlm.nih.gov/pubmed/37550325
http://dx.doi.org/10.1038/s41598-023-39420-y
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