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High-quality superconducting α-Ta film sputtered on the heated silicon substrate
Intrigued by the discovery of the long lifetime in the α-Ta/Al(2)O(3)-based Transmon qubit, researchers recently found α-Ta film is a promising platform for fabricating multi-qubits with long coherence time. To meet the requirements for integrating superconducting quantum circuits, the ideal method...
| Autores principales: | , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Nature Publishing Group UK
2023
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10406942/ https://www.ncbi.nlm.nih.gov/pubmed/37550325 http://dx.doi.org/10.1038/s41598-023-39420-y |