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Fabrication of Silicon Nanowires by Metal-Assisted Chemical Etching Combined with Micro-Vibration

In this work, we design a micro-vibration platform, which combined with the traditional metal-assisted chemical etching (MaCE) to etch silicon nanowires (SiNWs). The etching mechanism of SiNWs, including in the mass-transport (MT) and charge-transport (CT) processes, was explored through the charact...

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Detalles Bibliográficos
Autores principales:	Huang, Weiye, Wu, Junyi, Li, Wenxin, Chen, Guojin, Chu, Changyong, Li, Chao, Zhu, Yucheng, Yang, Hui, Chao, Yan
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2023
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10420322/ https://www.ncbi.nlm.nih.gov/pubmed/37570187 http://dx.doi.org/10.3390/ma16155483

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