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Positioning System of Infrared Sensors Based on ZnO Thin Film

Infrared sensors incorporating suspended zinc oxide (ZnO) pyroelectric films and thermally insulated silicon substrates are fabricated using conventional MEMS-based thin-film deposition, photolithography, and etching techniques. The responsivity of the pyroelectric film is improved via annealing at...

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Detalles Bibliográficos
Autores principales:	Tsai, Chia-Yu, Lin, Yan-Wen, Ku, Hong-Ming, Lee, Chia-Yen
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2023
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10422556/ https://www.ncbi.nlm.nih.gov/pubmed/37571600 http://dx.doi.org/10.3390/s23156818

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