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Beyond 5 GHz excitation of a ZnO-based high-overtone bulk acoustic resonator on SiC substrate

This work reports on the fabrication and characterization of an Au/ZnO/Pt-based high-overtone bulk acoustic resonator (HBAR) on SiC substrates. We evaluate its microwave characteristics comparing with Si substrates for micro-electromechanical applications. Dielectric magnetron sputtering and an elec...

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Detalles Bibliográficos
Autores principales:	Panda, Padmalochan, Chatterjee, Soumyadip, Tallur, Siddharth, Laha, Apurba
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	Nature Publishing Group UK 2023
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10432553/ https://www.ncbi.nlm.nih.gov/pubmed/37587141 http://dx.doi.org/10.1038/s41598-023-39760-9

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