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Application of piezoelectric actuator in series nano-positioning stage
The existing nano-positioning stages are driven by the piezoelectric ceramics, which have features of high accuracy and resolution, but the traditional positioning stage could not meet the requirement of large working space because the displacement of the piezoelectric ceramics is only tens of micro...
| Autores principales: | , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
SAGE Publications
2019
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| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10452751/ https://www.ncbi.nlm.nih.gov/pubmed/31789110 http://dx.doi.org/10.1177/0036850419892190 |