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Investigation of Inkjet-Printed Masks for Fast and Easy Photolithographic NIL Masters Manufacturing
Modern optical systems often require small, optically effective structures that have to be manufactured both precisely and cost-effectively. One option to do this is using nanoimprint lithography (NIL), in which the optical structures are replicated as masters using a stamping process. It would also...
| Autores principales: | , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
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MDPI
2023
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| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10456390/ https://www.ncbi.nlm.nih.gov/pubmed/37630060 http://dx.doi.org/10.3390/mi14081524 |