Combined Temperature Compensation Method for Closed-Loop Microelectromechanical System Capacitive Accelerometer

This article describes a closed-loop detection MEMS accelerometer for acceleration measurement. This paper analyzes the working principle of MEMS accelerometers in detail and explains the relationship between the accelerometer zero bias, scale factor and voltage reference. Therefore, a combined compensation method is designed via reference voltage source compensation and terminal temperature compensation of the accelerometer, which comprehensively improves the performance over a wide temperature range of the accelerometer. The experiment results show that the initial range is reduced from 3679 ppm to 221 ppm with reference voltage source compensation, zero-bias stability of the accelerometer over temperature is increased by 14.3% on average and the scale factor stability over temperature is increased by 88.2% on average. After combined compensation, one accelerometer zero-bias stability over temperature was reduced to 40 μg and the scale factor stability over temperature was reduced to 16 ppm, the average value of the zero-bias stability over temperature was reduced from 1764 μg to 36 μg, the average value of the scale factor stability over temperature was reduced from 2270 ppm to 25 ppm, the average stability of the zero bias was increased by 97.96% and the average stability of the scale factor was increased by 98.90%.