Combined Temperature Compensation Method for Closed-Loop Microelectromechanical System Capacitive Accelerometer

This article describes a closed-loop detection MEMS accelerometer for acceleration measurement. This paper analyzes the working principle of MEMS accelerometers in detail and explains the relationship between the accelerometer zero bias, scale factor and voltage reference. Therefore, a combined comp...

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Detalles Bibliográficos
Autores principales: Liu, Guowen, Liu, Yu, Li, Zhaohan, Ma, Zhikang, Ma, Xiao, Wang, Xuefeng, Zheng, Xudong, Jin, Zhonghe
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10456641/
https://www.ncbi.nlm.nih.gov/pubmed/37630159
http://dx.doi.org/10.3390/mi14081623

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