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Design of a Biaxial High-G Piezoresistive Accelerometer with a Tension–Compression Structure

To meet the measurement needs of multidimensional high-g acceleration in fields such as weapon penetration, aerospace, and explosive shock, a biaxial piezoresistive accelerometer incorporating tension–compression is meticulously designed. This study begins by thoroughly examining the tension–compres...

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Detalles Bibliográficos
Autores principales: Wang, Peng, Yang, Yujun, Chen, Manlong, Zhang, Changming, Wang, Nan, Yang, Fan, Peng, Chunlei, Han, Jike, Dai, Yuqiang
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10456674/
https://www.ncbi.nlm.nih.gov/pubmed/37630028
http://dx.doi.org/10.3390/mi14081492
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author Wang, Peng
Yang, Yujun
Chen, Manlong
Zhang, Changming
Wang, Nan
Yang, Fan
Peng, Chunlei
Han, Jike
Dai, Yuqiang
author_facet Wang, Peng
Yang, Yujun
Chen, Manlong
Zhang, Changming
Wang, Nan
Yang, Fan
Peng, Chunlei
Han, Jike
Dai, Yuqiang
author_sort Wang, Peng
collection PubMed
description To meet the measurement needs of multidimensional high-g acceleration in fields such as weapon penetration, aerospace, and explosive shock, a biaxial piezoresistive accelerometer incorporating tension–compression is meticulously designed. This study begins by thoroughly examining the tension–compression measurement mechanism and designing the sensor’s sensitive structure. A signal test circuit is developed to effectively mitigate cross-interference, taking into account the stress variation characteristics of the cantilever beam. Subsequently, the signal test circuit of anti-cross-interference is designed according to the stress variation characteristics of the cantilever beam. Next, the finite element method is applied to analyze the structure and obtain the performance indices of the range, vibration modes, and sensitivity of the sensor. Finally, the process flow and packaging scheme of the chip are analyzed. The results show that the sensor has a full range of 200,000 g, a sensitivity of 1.39 µV/g in the X direction and 1.42 µV/g in the Y direction, and natural frequencies of 509.8 kHz and 510.2 kHz in the X and Y directions, respectively.
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spelling pubmed-104566742023-08-26 Design of a Biaxial High-G Piezoresistive Accelerometer with a Tension–Compression Structure Wang, Peng Yang, Yujun Chen, Manlong Zhang, Changming Wang, Nan Yang, Fan Peng, Chunlei Han, Jike Dai, Yuqiang Micromachines (Basel) Article To meet the measurement needs of multidimensional high-g acceleration in fields such as weapon penetration, aerospace, and explosive shock, a biaxial piezoresistive accelerometer incorporating tension–compression is meticulously designed. This study begins by thoroughly examining the tension–compression measurement mechanism and designing the sensor’s sensitive structure. A signal test circuit is developed to effectively mitigate cross-interference, taking into account the stress variation characteristics of the cantilever beam. Subsequently, the signal test circuit of anti-cross-interference is designed according to the stress variation characteristics of the cantilever beam. Next, the finite element method is applied to analyze the structure and obtain the performance indices of the range, vibration modes, and sensitivity of the sensor. Finally, the process flow and packaging scheme of the chip are analyzed. The results show that the sensor has a full range of 200,000 g, a sensitivity of 1.39 µV/g in the X direction and 1.42 µV/g in the Y direction, and natural frequencies of 509.8 kHz and 510.2 kHz in the X and Y directions, respectively. MDPI 2023-07-25 /pmc/articles/PMC10456674/ /pubmed/37630028 http://dx.doi.org/10.3390/mi14081492 Text en © 2023 by the authors. https://creativecommons.org/licenses/by/4.0/Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/).
spellingShingle Article
Wang, Peng
Yang, Yujun
Chen, Manlong
Zhang, Changming
Wang, Nan
Yang, Fan
Peng, Chunlei
Han, Jike
Dai, Yuqiang
Design of a Biaxial High-G Piezoresistive Accelerometer with a Tension–Compression Structure
title Design of a Biaxial High-G Piezoresistive Accelerometer with a Tension–Compression Structure
title_full Design of a Biaxial High-G Piezoresistive Accelerometer with a Tension–Compression Structure
title_fullStr Design of a Biaxial High-G Piezoresistive Accelerometer with a Tension–Compression Structure
title_full_unstemmed Design of a Biaxial High-G Piezoresistive Accelerometer with a Tension–Compression Structure
title_short Design of a Biaxial High-G Piezoresistive Accelerometer with a Tension–Compression Structure
title_sort design of a biaxial high-g piezoresistive accelerometer with a tension–compression structure
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10456674/
https://www.ncbi.nlm.nih.gov/pubmed/37630028
http://dx.doi.org/10.3390/mi14081492
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