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Study on ZrSi(2) as a Candidate Material for Extreme Ultraviolet Pellicles

An extreme ultraviolet (EUV) pellicle is an ultrathin membrane at a stand-off distance from the reticle surface that protects the EUV mask from contamination during the exposure process. EUV pellicles must exhibit high EUV transmittance, low EUV reflectivity, and superior thermomechanical durability...

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Detalles Bibliográficos
Autores principales:	Wi, Seong Ju, Kim, Won Jin, Kim, Haneul, Jeong, Dongmin, Lee, Dong Gi, Choi, Jaehyuck, Cho, Sang Jin, Yu, Lan, Ahn, Jinho
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2023
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10456829/ https://www.ncbi.nlm.nih.gov/pubmed/37623792 http://dx.doi.org/10.3390/membranes13080731

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