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Editorial for the Special Issue on Recent Advances in Reactive Ion Etching and Applications of High-Aspect-Ratio Microfabrication
| Autores principales: | , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2023
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10456888/ https://www.ncbi.nlm.nih.gov/pubmed/37630166 http://dx.doi.org/10.3390/mi14081630 |
| _version_ | 1785096807494189056 |
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| author | Romano, Lucia Jefimovs, Konstantins |
| author_facet | Romano, Lucia Jefimovs, Konstantins |
| author_sort | Romano, Lucia |
| collection | PubMed |
| description | |
| format | Online Article Text |
| id | pubmed-10456888 |
| institution | National Center for Biotechnology Information |
| language | English |
| publishDate | 2023 |
| publisher | MDPI |
| record_format | MEDLINE/PubMed |
| spelling | pubmed-104568882023-08-26 Editorial for the Special Issue on Recent Advances in Reactive Ion Etching and Applications of High-Aspect-Ratio Microfabrication Romano, Lucia Jefimovs, Konstantins Micromachines (Basel) Editorial MDPI 2023-08-18 /pmc/articles/PMC10456888/ /pubmed/37630166 http://dx.doi.org/10.3390/mi14081630 Text en © 2023 by the authors. https://creativecommons.org/licenses/by/4.0/Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/). |
| spellingShingle | Editorial Romano, Lucia Jefimovs, Konstantins Editorial for the Special Issue on Recent Advances in Reactive Ion Etching and Applications of High-Aspect-Ratio Microfabrication |
| title | Editorial for the Special Issue on Recent Advances in Reactive Ion Etching and Applications of High-Aspect-Ratio Microfabrication |
| title_full | Editorial for the Special Issue on Recent Advances in Reactive Ion Etching and Applications of High-Aspect-Ratio Microfabrication |
| title_fullStr | Editorial for the Special Issue on Recent Advances in Reactive Ion Etching and Applications of High-Aspect-Ratio Microfabrication |
| title_full_unstemmed | Editorial for the Special Issue on Recent Advances in Reactive Ion Etching and Applications of High-Aspect-Ratio Microfabrication |
| title_short | Editorial for the Special Issue on Recent Advances in Reactive Ion Etching and Applications of High-Aspect-Ratio Microfabrication |
| title_sort | editorial for the special issue on recent advances in reactive ion etching and applications of high-aspect-ratio microfabrication |
| topic | Editorial |
| url | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10456888/ https://www.ncbi.nlm.nih.gov/pubmed/37630166 http://dx.doi.org/10.3390/mi14081630 |
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