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Niobium Nitride Preparation for Superconducting Single-Photon Detectors
Niobium nitride (NbN) is widely used in the production of superconducting nanowire single-photon detectors (SNSPDs) due to its high superconducting transition temperature and suitable energy gap. The processing parameters used for the preparation of NbN films and the subsequent processing of nanowir...
Autores principales: | , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2023
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10488398/ https://www.ncbi.nlm.nih.gov/pubmed/37687029 http://dx.doi.org/10.3390/molecules28176200 |
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author | Luo, Peng Zhao, Yihui |
author_facet | Luo, Peng Zhao, Yihui |
author_sort | Luo, Peng |
collection | PubMed |
description | Niobium nitride (NbN) is widely used in the production of superconducting nanowire single-photon detectors (SNSPDs) due to its high superconducting transition temperature and suitable energy gap. The processing parameters used for the preparation of NbN films and the subsequent processing of nanowires have a significant effect on the performance of the SNSPD. In this review, we will present various thin film growth methods, including magnetron sputtering, atomic layer deposition (ALD), and chemical vapor deposition (CVD). The relationships between the superconducting performance of each thin film and the corresponding deposition process will be discussed. Subsequently, NbN nanowire fabrication methods and microstructures based on thin film etching will be summarized, and their impact on the qualities of the finished SNSPDs will be systematically analyzed. Finally, we will provide an outlook for the future development of preparation for SNSPD. |
format | Online Article Text |
id | pubmed-10488398 |
institution | National Center for Biotechnology Information |
language | English |
publishDate | 2023 |
publisher | MDPI |
record_format | MEDLINE/PubMed |
spelling | pubmed-104883982023-09-09 Niobium Nitride Preparation for Superconducting Single-Photon Detectors Luo, Peng Zhao, Yihui Molecules Review Niobium nitride (NbN) is widely used in the production of superconducting nanowire single-photon detectors (SNSPDs) due to its high superconducting transition temperature and suitable energy gap. The processing parameters used for the preparation of NbN films and the subsequent processing of nanowires have a significant effect on the performance of the SNSPD. In this review, we will present various thin film growth methods, including magnetron sputtering, atomic layer deposition (ALD), and chemical vapor deposition (CVD). The relationships between the superconducting performance of each thin film and the corresponding deposition process will be discussed. Subsequently, NbN nanowire fabrication methods and microstructures based on thin film etching will be summarized, and their impact on the qualities of the finished SNSPDs will be systematically analyzed. Finally, we will provide an outlook for the future development of preparation for SNSPD. MDPI 2023-08-23 /pmc/articles/PMC10488398/ /pubmed/37687029 http://dx.doi.org/10.3390/molecules28176200 Text en © 2023 by the authors. https://creativecommons.org/licenses/by/4.0/Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/). |
spellingShingle | Review Luo, Peng Zhao, Yihui Niobium Nitride Preparation for Superconducting Single-Photon Detectors |
title | Niobium Nitride Preparation for Superconducting Single-Photon Detectors |
title_full | Niobium Nitride Preparation for Superconducting Single-Photon Detectors |
title_fullStr | Niobium Nitride Preparation for Superconducting Single-Photon Detectors |
title_full_unstemmed | Niobium Nitride Preparation for Superconducting Single-Photon Detectors |
title_short | Niobium Nitride Preparation for Superconducting Single-Photon Detectors |
title_sort | niobium nitride preparation for superconducting single-photon detectors |
topic | Review |
url | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10488398/ https://www.ncbi.nlm.nih.gov/pubmed/37687029 http://dx.doi.org/10.3390/molecules28176200 |
work_keys_str_mv | AT luopeng niobiumnitridepreparationforsuperconductingsinglephotondetectors AT zhaoyihui niobiumnitridepreparationforsuperconductingsinglephotondetectors |