Tungsten–SiO(2)–Based Planar Field Emission Microtriodes with Different Electrode Topologies

This study examines the electrical properties and layer quality of field emission microtriodes that have planar electrode geometry and are based on tungsten (W) and silicon dioxide (SiO(2)). Two types of microtriodes were analyzed: one with a multi-tip cathode fabricated using photolithography (PL)...

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Detalles Bibliográficos
Autores principales: Avotina, Liga, Bikse, Liga, Dekhtyar, Yuri, Goldmane, Annija Elizabete, Kizane, Gunta, Muhin, Aleksei, Romanova, Marina, Smits, Krisjanis, Sorokins, Hermanis, Vilken, Aleksandr, Zaslavskis, Aleksandrs
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10488438/
https://www.ncbi.nlm.nih.gov/pubmed/37687474
http://dx.doi.org/10.3390/ma16175781

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10488438/
https://www.ncbi.nlm.nih.gov/pubmed/37687474
http://dx.doi.org/10.3390/ma16175781

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