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Acoustic Waves in Piezoelectric Layered Structure for Selective Detection of Liquid Viscosity
The acoustic waves of higher orders propagating in a layered structure consisting of a silicon plate coated with piezoelectric ZnO and/or AlN films were used for the development of a sensor with selective sensitivity to liquid viscosity η in the range of 1–1500 cP. In that range, this sensor possess...
| Autores principales: | , , , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2023
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10489902/ https://www.ncbi.nlm.nih.gov/pubmed/37687786 http://dx.doi.org/10.3390/s23177329 |