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Low-Power AlGaN/GaN Triangular Microcantilever for Air Flow Detection

This paper investigates an AlGaN/GaN triangular microcantilever with a heated apex for airflow detection utilizing a very simple two-terminal sensor configuration. Thermal microscope images were used to verify that the apex region of the microcantilever reached significantly higher temperatures than...

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Detalles Bibliográficos
Autores principales: Uppalapati, Balaadithya, Gajula, Durga, Bava, Manav, Muthusamy, Lavanya, Koley, Goutam
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10490568/
https://www.ncbi.nlm.nih.gov/pubmed/37687921
http://dx.doi.org/10.3390/s23177465
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author Uppalapati, Balaadithya
Gajula, Durga
Bava, Manav
Muthusamy, Lavanya
Koley, Goutam
author_facet Uppalapati, Balaadithya
Gajula, Durga
Bava, Manav
Muthusamy, Lavanya
Koley, Goutam
author_sort Uppalapati, Balaadithya
collection PubMed
description This paper investigates an AlGaN/GaN triangular microcantilever with a heated apex for airflow detection utilizing a very simple two-terminal sensor configuration. Thermal microscope images were used to verify that the apex region of the microcantilever reached significantly higher temperatures than other parts under applied voltage bias. The sensor response was found to vary linearly with airflow rate when tested over a range of airflow varying from 16 to 2000 sccm. The noise-limited flow volume measurement yielded ~4 sccm resolution, while the velocity resolution was found to be 0.241 cm/s, which is one of the best reported so far for thermal sensors. The sensor was able to operate at a very low power consumption level of ~5 mW, which is one of the lowest reported for these types of sensors. The intrinsic response time of the sensor was estimated to be on the order of a few ms, limited by its thermal properties. Overall, the microcantilever sensor, with its simple geometry and measurement configurations, was found to exhibit attractive performance metrics useful for various sensing applications.
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spelling pubmed-104905682023-09-09 Low-Power AlGaN/GaN Triangular Microcantilever for Air Flow Detection Uppalapati, Balaadithya Gajula, Durga Bava, Manav Muthusamy, Lavanya Koley, Goutam Sensors (Basel) Article This paper investigates an AlGaN/GaN triangular microcantilever with a heated apex for airflow detection utilizing a very simple two-terminal sensor configuration. Thermal microscope images were used to verify that the apex region of the microcantilever reached significantly higher temperatures than other parts under applied voltage bias. The sensor response was found to vary linearly with airflow rate when tested over a range of airflow varying from 16 to 2000 sccm. The noise-limited flow volume measurement yielded ~4 sccm resolution, while the velocity resolution was found to be 0.241 cm/s, which is one of the best reported so far for thermal sensors. The sensor was able to operate at a very low power consumption level of ~5 mW, which is one of the lowest reported for these types of sensors. The intrinsic response time of the sensor was estimated to be on the order of a few ms, limited by its thermal properties. Overall, the microcantilever sensor, with its simple geometry and measurement configurations, was found to exhibit attractive performance metrics useful for various sensing applications. MDPI 2023-08-28 /pmc/articles/PMC10490568/ /pubmed/37687921 http://dx.doi.org/10.3390/s23177465 Text en © 2023 by the authors. https://creativecommons.org/licenses/by/4.0/Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/).
spellingShingle Article
Uppalapati, Balaadithya
Gajula, Durga
Bava, Manav
Muthusamy, Lavanya
Koley, Goutam
Low-Power AlGaN/GaN Triangular Microcantilever for Air Flow Detection
title Low-Power AlGaN/GaN Triangular Microcantilever for Air Flow Detection
title_full Low-Power AlGaN/GaN Triangular Microcantilever for Air Flow Detection
title_fullStr Low-Power AlGaN/GaN Triangular Microcantilever for Air Flow Detection
title_full_unstemmed Low-Power AlGaN/GaN Triangular Microcantilever for Air Flow Detection
title_short Low-Power AlGaN/GaN Triangular Microcantilever for Air Flow Detection
title_sort low-power algan/gan triangular microcantilever for air flow detection
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10490568/
https://www.ncbi.nlm.nih.gov/pubmed/37687921
http://dx.doi.org/10.3390/s23177465
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