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Low-Power AlGaN/GaN Triangular Microcantilever for Air Flow Detection
This paper investigates an AlGaN/GaN triangular microcantilever with a heated apex for airflow detection utilizing a very simple two-terminal sensor configuration. Thermal microscope images were used to verify that the apex region of the microcantilever reached significantly higher temperatures than...
Autores principales: | , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2023
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10490568/ https://www.ncbi.nlm.nih.gov/pubmed/37687921 http://dx.doi.org/10.3390/s23177465 |
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author | Uppalapati, Balaadithya Gajula, Durga Bava, Manav Muthusamy, Lavanya Koley, Goutam |
author_facet | Uppalapati, Balaadithya Gajula, Durga Bava, Manav Muthusamy, Lavanya Koley, Goutam |
author_sort | Uppalapati, Balaadithya |
collection | PubMed |
description | This paper investigates an AlGaN/GaN triangular microcantilever with a heated apex for airflow detection utilizing a very simple two-terminal sensor configuration. Thermal microscope images were used to verify that the apex region of the microcantilever reached significantly higher temperatures than other parts under applied voltage bias. The sensor response was found to vary linearly with airflow rate when tested over a range of airflow varying from 16 to 2000 sccm. The noise-limited flow volume measurement yielded ~4 sccm resolution, while the velocity resolution was found to be 0.241 cm/s, which is one of the best reported so far for thermal sensors. The sensor was able to operate at a very low power consumption level of ~5 mW, which is one of the lowest reported for these types of sensors. The intrinsic response time of the sensor was estimated to be on the order of a few ms, limited by its thermal properties. Overall, the microcantilever sensor, with its simple geometry and measurement configurations, was found to exhibit attractive performance metrics useful for various sensing applications. |
format | Online Article Text |
id | pubmed-10490568 |
institution | National Center for Biotechnology Information |
language | English |
publishDate | 2023 |
publisher | MDPI |
record_format | MEDLINE/PubMed |
spelling | pubmed-104905682023-09-09 Low-Power AlGaN/GaN Triangular Microcantilever for Air Flow Detection Uppalapati, Balaadithya Gajula, Durga Bava, Manav Muthusamy, Lavanya Koley, Goutam Sensors (Basel) Article This paper investigates an AlGaN/GaN triangular microcantilever with a heated apex for airflow detection utilizing a very simple two-terminal sensor configuration. Thermal microscope images were used to verify that the apex region of the microcantilever reached significantly higher temperatures than other parts under applied voltage bias. The sensor response was found to vary linearly with airflow rate when tested over a range of airflow varying from 16 to 2000 sccm. The noise-limited flow volume measurement yielded ~4 sccm resolution, while the velocity resolution was found to be 0.241 cm/s, which is one of the best reported so far for thermal sensors. The sensor was able to operate at a very low power consumption level of ~5 mW, which is one of the lowest reported for these types of sensors. The intrinsic response time of the sensor was estimated to be on the order of a few ms, limited by its thermal properties. Overall, the microcantilever sensor, with its simple geometry and measurement configurations, was found to exhibit attractive performance metrics useful for various sensing applications. MDPI 2023-08-28 /pmc/articles/PMC10490568/ /pubmed/37687921 http://dx.doi.org/10.3390/s23177465 Text en © 2023 by the authors. https://creativecommons.org/licenses/by/4.0/Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/). |
spellingShingle | Article Uppalapati, Balaadithya Gajula, Durga Bava, Manav Muthusamy, Lavanya Koley, Goutam Low-Power AlGaN/GaN Triangular Microcantilever for Air Flow Detection |
title | Low-Power AlGaN/GaN Triangular Microcantilever for Air Flow Detection |
title_full | Low-Power AlGaN/GaN Triangular Microcantilever for Air Flow Detection |
title_fullStr | Low-Power AlGaN/GaN Triangular Microcantilever for Air Flow Detection |
title_full_unstemmed | Low-Power AlGaN/GaN Triangular Microcantilever for Air Flow Detection |
title_short | Low-Power AlGaN/GaN Triangular Microcantilever for Air Flow Detection |
title_sort | low-power algan/gan triangular microcantilever for air flow detection |
topic | Article |
url | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10490568/ https://www.ncbi.nlm.nih.gov/pubmed/37687921 http://dx.doi.org/10.3390/s23177465 |
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