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Low-Power AlGaN/GaN Triangular Microcantilever for Air Flow Detection

This paper investigates an AlGaN/GaN triangular microcantilever with a heated apex for airflow detection utilizing a very simple two-terminal sensor configuration. Thermal microscope images were used to verify that the apex region of the microcantilever reached significantly higher temperatures than...

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Detalles Bibliográficos
Autores principales:	Uppalapati, Balaadithya, Gajula, Durga, Bava, Manav, Muthusamy, Lavanya, Koley, Goutam
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2023
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10490568/ https://www.ncbi.nlm.nih.gov/pubmed/37687921 http://dx.doi.org/10.3390/s23177465

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