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Two-dimensional analytical description of the plasma potential in a magnetron discharge
Simple analytical formulas are proposed to describe the plasma potential in a steady-state magnetron discharge, based on the results of various experiments and numerical simulations reported in the literature. The description is two-dimensional (2D), covering two main regions, the cathode sheath and...
| Autores principales: | , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Nature Publishing Group UK
2023
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| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10517992/ https://www.ncbi.nlm.nih.gov/pubmed/37741894 http://dx.doi.org/10.1038/s41598-023-42949-7 |