Dewetting-Assisted Patterning: A Lithography-Free Route to Synthesize Black and Colored Silicon

[Image: see text] We report the use of thermal dewetting to structure gold-based catalytic etching masks for metal-assisted chemical etching (MACE). The approach involves low-temperature dewetting of metal films to generate metal holey meshes with tunable morphologies. Combined with MACE, dewetting-...

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Detalles Bibliográficos
Autores principales: Farhadi, Amin, Bartschmid, Theresa, Bourret, Gilles R.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: American Chemical Society 2023
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10520913/
https://www.ncbi.nlm.nih.gov/pubmed/37669230
http://dx.doi.org/10.1021/acsami.3c08533

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10520913/
https://www.ncbi.nlm.nih.gov/pubmed/37669230
http://dx.doi.org/10.1021/acsami.3c08533

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