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Dewetting-Assisted Patterning: A Lithography-Free Route to Synthesize Black and Colored Silicon
[Image: see text] We report the use of thermal dewetting to structure gold-based catalytic etching masks for metal-assisted chemical etching (MACE). The approach involves low-temperature dewetting of metal films to generate metal holey meshes with tunable morphologies. Combined with MACE, dewetting-...
| Autores principales: | , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
American Chemical Society
2023
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| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10520913/ https://www.ncbi.nlm.nih.gov/pubmed/37669230 http://dx.doi.org/10.1021/acsami.3c08533 |