Fabrication of Amorphous Silicon–Carbon Hybrid Films Using Single-Source Precursors

[Image: see text] The aim of this study was the preparation of different amorphous silicon–carbon hybrid thin-layer materials according to the liquid phase deposition (LPD) process using single-source precursors. In our study, 2-methyl-2-silyltrisilane (methylisotetrasilane; 2), 1,1,1-trimethyl-2,2-...

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Detalles Bibliográficos
Autores principales: Sauermoser, Aileen, Lainer, Thomas, Knoechl, Andreas, Goni, Freskida, Fischer, Roland C., Fitzek, Harald, Dienstleder, Martina, Prietl, Christine, Kelterer, Anne-Marie, Bandl, Christine, Jakopic, Georg, Kothleitner, Gerald, Haas, Michael
Formato: Online Artículo Texto
Lenguaje:English
Publicado: American Chemical Society 2023
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10523434/
https://www.ncbi.nlm.nih.gov/pubmed/37700615
http://dx.doi.org/10.1021/acs.inorgchem.3c01846

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