Sub-terahertz feedback interferometry and imaging with emitters in 130 nm BiCMOS technology

In this work, we present the effect of self-mixing in compact terahertz emitters implemented in a 130 nm SiGe BiCMOS technology. The devices are based on a differential Colpitts oscillator topology with optimized emission frequency at the fundamental harmonic. The radiation is out-coupled through the substrate side using a hyper-hemispheric silicon lens. The first source is optimized for 200 GHz and radiates up to 0.525 mW of propagating power. The second source emits up to 0.325 mW at 260 GHz. We demonstrate that in these devices, feedback radiation produces the change in bias current, the magnitude of which can reach up to several percent compared to the bias current itself, enabling feedback interferometric measurements. We demonstrate the applicability of feedback interferometry to perform coherent reflection-type raster-scan imaging.