Resonant-Type Piezoelectric Pump Driven by Piezoelectric Stacks and a Rhombic Micro Displacement Amplifier

To obtain a high flow rate, a resonant-type piezoelectric pump is designed, fabricated, and studied in this paper. The pump consists of four parts: a piezoelectric vibrator, a pump chamber, a check valve and a compressible space. The designed piezoelectric vibrator is composed of a rhombic micro displacement amplifier, counterweight blocks and two piezoelectric stacks with low-voltage drive and a large output displacement. ANSYS software (Workbench 19.0) simulation results show that at the natural frequency of 946 Hz, the designed piezoelectric vibrator will produce the maximum output displacement. The bilateral deformation is symmetrical, and the phase difference is zero. Frequency, voltage, and backpressure characteristics of the piezoelectric pump are investigated. The experimental results show that at a certain operating frequency, the flow rate and the backpressure of the piezoelectric pump both increase with the increase in voltage. When the applied voltage is 150 V(pp), the flow rate reaches a peak of 367.48 mL/min at 720 Hz for one diaphragm pump, and reaches a peak of 700.15 mL/min at 716 Hz for two diaphragm pumps.