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Thermal Reflow Simulation for PMMA Structures with Nonuniform Viscosity Profile
This paper presents a new approach to the simulation of the thermal reflow of e-beam-exposed polymethyl methacrylate (PMMA) taking into account its nonuniform viscosity profile. This approach is based on numerical “soapfilm” modeling of the surface evolution, processed by the free software “Surface...
| Autores principales: | , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2023
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10534791/ https://www.ncbi.nlm.nih.gov/pubmed/37765585 http://dx.doi.org/10.3390/polym15183731 |