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Low Power Compact 3D-Constructed AlScN Piezoelectric MEMS Mirrors for Various Scanning Strategies

In this paper, the newly developed 3D-constructed AlScN piezoelectric MEMS mirror is presented. This paper describes the structure and driving mechanism of the proposed mirror device, covering its driving characteristics in both quasi-static and resonant scan modes. Particularly, this paper deals wi...

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Detalles Bibliográficos
Autores principales:	Hwang, Jeong-Yeon, Wysocki, Lena, Yarar, Erdem, Wille, Gunnar, Röhr, Fin, Albers, Jörg, Gu-Stoppel, Shanshan
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2023
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10535209/ https://www.ncbi.nlm.nih.gov/pubmed/37763952 http://dx.doi.org/10.3390/mi14091789

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