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Study of Through Glass Via (TGV) Using Bessel Beam, Ultrashort Two-Pulses of Laser and Selective Chemical Etching

Selective laser etching is a promising candidate for the mass production of glass interposers. It comprises two steps: local modification by an ultrashort-pulsed laser and chemical etching of the modified volume. According to previous studies, when an ultrashort-pulsed laser beam is irradiated on th...

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Detalles Bibliográficos
Autores principales:	Kim, Jonghyeok, Kim, Sungil, Kim, Byungjoo, Choi, Jiyeon, Ahn, Sanghoon
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2023
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10536211/ https://www.ncbi.nlm.nih.gov/pubmed/37763929 http://dx.doi.org/10.3390/mi14091766

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