Design Guidelines for Thin Diaphragm-Based Microsystems through Comprehensive Numerical and Analytical Studies

This paper presents comprehensive guidelines for the design and analysis of a thin diaphragm that is used in a variety of microsystems, including microphones and pressure sensors. It highlights the empirical relations that can be utilized for the design of thin diaphragm-based microsystems (TDMS). D...

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Detalles Bibliográficos
Autores principales: Belwanshi, Vinod, Rane, Kedarnath, Kumar, Vibhor, Pramanick, Bidhan
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10536382/
https://www.ncbi.nlm.nih.gov/pubmed/37763887
http://dx.doi.org/10.3390/mi14091725

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10536382/
https://www.ncbi.nlm.nih.gov/pubmed/37763887
http://dx.doi.org/10.3390/mi14091725

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