A High-Precision Quartz Resonant Ultra-High Pressure Sensor with Integrated Pressure Conversion Structure

A quartz resonant pressure sensor is proposed for high-precision measurement of ultra-high pressure. The resonant unit realizes a push–pull differential layout, which restrains the common-mode interference factor, and the resonator is only subject to axial force. The pressure conversion unit is made...

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Detalles Bibliográficos
Autores principales: Zhang, Quanwei, Li, Cun, Li, Huafeng, Liu, Yan, Wang, Jue, Wang, Xiaolong, Wang, Yuan, Cheng, Fabin, Han, Haijun, Zhang, Peng
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10536593/
https://www.ncbi.nlm.nih.gov/pubmed/37763820
http://dx.doi.org/10.3390/mi14091657

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10536593/
https://www.ncbi.nlm.nih.gov/pubmed/37763820
http://dx.doi.org/10.3390/mi14091657

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