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A High-Precision Quartz Resonant Ultra-High Pressure Sensor with Integrated Pressure Conversion Structure
A quartz resonant pressure sensor is proposed for high-precision measurement of ultra-high pressure. The resonant unit realizes a push–pull differential layout, which restrains the common-mode interference factor, and the resonator is only subject to axial force. The pressure conversion unit is made...
Autores principales: | Zhang, Quanwei, Li, Cun, Li, Huafeng, Liu, Yan, Wang, Jue, Wang, Xiaolong, Wang, Yuan, Cheng, Fabin, Han, Haijun, Zhang, Peng |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2023
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10536593/ https://www.ncbi.nlm.nih.gov/pubmed/37763820 http://dx.doi.org/10.3390/mi14091657 |
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