A Study on the Harmonic Distortion of Seismic-Grade Sigma-Delta MEMS Accelerometers Using a Multiple Degree-of-Freedom Model

Harmonic distortion is one of the dominant factors limiting the overall signal-to-noise and distortion ratio of seismic-grade sigma-delta MEMS accelerometers. This study investigates harmonic distortion based on the multiple degree-of-freedom model (MDM) established in our previous study. The main a...

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Detalles Bibliográficos
Autores principales: Wang, Xuefeng, Zhang, Penghao, Ding, Shijin
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10575202/
https://www.ncbi.nlm.nih.gov/pubmed/37837052
http://dx.doi.org/10.3390/s23198222

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10575202/
https://www.ncbi.nlm.nih.gov/pubmed/37837052
http://dx.doi.org/10.3390/s23198222

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