Cargando…

The Performance Characterization and Optimization of Fiber-Optic Acoustic Pressure Sensors Based on the MOEMS Sensitized Structure

In order to investigate the factors affecting the acoustic performance of the extrinsic Fabry–Perot interferometer (EFPI) fiber-optic acoustic pressure sensor and to effectively improve its detection capability, this paper enhances the sensor’s detection sensitivity by adding more sensitized rings t...

Descripción completa

Detalles Bibliográficos
Autores principales: Zhou, Ruling, Guan, Chenggang, Lv, Hui, Li, Shasha, Lv, Puchu, Qin, Haixin, Chu, Wenxiu, Zhou, Yikai, Zhang, Yihao, Li, Xiaoqiang
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10575427/
https://www.ncbi.nlm.nih.gov/pubmed/37837130
http://dx.doi.org/10.3390/s23198300
_version_ 1785120919424860160
author Zhou, Ruling
Guan, Chenggang
Lv, Hui
Li, Shasha
Lv, Puchu
Qin, Haixin
Chu, Wenxiu
Zhou, Yikai
Zhang, Yihao
Li, Xiaoqiang
author_facet Zhou, Ruling
Guan, Chenggang
Lv, Hui
Li, Shasha
Lv, Puchu
Qin, Haixin
Chu, Wenxiu
Zhou, Yikai
Zhang, Yihao
Li, Xiaoqiang
author_sort Zhou, Ruling
collection PubMed
description In order to investigate the factors affecting the acoustic performance of the extrinsic Fabry–Perot interferometer (EFPI) fiber-optic acoustic pressure sensor and to effectively improve its detection capability, this paper enhances the sensor’s detection sensitivity by adding more sensitized rings to its acoustic pressure-sensitive film. Furthermore, a novel real-time coupled acoustic test method is proposed to simultaneously monitor the changes in the spectral and acoustic metrics of the sensor to characterize its overall performance. Finally, an EFPI-type fiber-optic acoustic pressure sensor was developed based on the Micro-Optical Electro-Mechanical System (MOEMS). The acoustic tests indicate that the optimized fiber-optic acoustic pressure sensor has a sensitivity as high as 2253.2 mV/Pa, and the acoustic overload point (AOP) and signal-to-noise ratios (SNRs) can reach 108.85 dB SPL and 79.22 dB, respectively. These results show that the sensor produced through performance characterization experiments and subsequent optimization has a very high acoustic performance index, which provides a scientific theoretical basis for improving the overall performance of the sensor and will have broad application prospects in the field of acoustic detection.
format Online
Article
Text
id pubmed-10575427
institution National Center for Biotechnology Information
language English
publishDate 2023
publisher MDPI
record_format MEDLINE/PubMed
spelling pubmed-105754272023-10-14 The Performance Characterization and Optimization of Fiber-Optic Acoustic Pressure Sensors Based on the MOEMS Sensitized Structure Zhou, Ruling Guan, Chenggang Lv, Hui Li, Shasha Lv, Puchu Qin, Haixin Chu, Wenxiu Zhou, Yikai Zhang, Yihao Li, Xiaoqiang Sensors (Basel) Article In order to investigate the factors affecting the acoustic performance of the extrinsic Fabry–Perot interferometer (EFPI) fiber-optic acoustic pressure sensor and to effectively improve its detection capability, this paper enhances the sensor’s detection sensitivity by adding more sensitized rings to its acoustic pressure-sensitive film. Furthermore, a novel real-time coupled acoustic test method is proposed to simultaneously monitor the changes in the spectral and acoustic metrics of the sensor to characterize its overall performance. Finally, an EFPI-type fiber-optic acoustic pressure sensor was developed based on the Micro-Optical Electro-Mechanical System (MOEMS). The acoustic tests indicate that the optimized fiber-optic acoustic pressure sensor has a sensitivity as high as 2253.2 mV/Pa, and the acoustic overload point (AOP) and signal-to-noise ratios (SNRs) can reach 108.85 dB SPL and 79.22 dB, respectively. These results show that the sensor produced through performance characterization experiments and subsequent optimization has a very high acoustic performance index, which provides a scientific theoretical basis for improving the overall performance of the sensor and will have broad application prospects in the field of acoustic detection. MDPI 2023-10-07 /pmc/articles/PMC10575427/ /pubmed/37837130 http://dx.doi.org/10.3390/s23198300 Text en © 2023 by the authors. https://creativecommons.org/licenses/by/4.0/Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/).
spellingShingle Article
Zhou, Ruling
Guan, Chenggang
Lv, Hui
Li, Shasha
Lv, Puchu
Qin, Haixin
Chu, Wenxiu
Zhou, Yikai
Zhang, Yihao
Li, Xiaoqiang
The Performance Characterization and Optimization of Fiber-Optic Acoustic Pressure Sensors Based on the MOEMS Sensitized Structure
title The Performance Characterization and Optimization of Fiber-Optic Acoustic Pressure Sensors Based on the MOEMS Sensitized Structure
title_full The Performance Characterization and Optimization of Fiber-Optic Acoustic Pressure Sensors Based on the MOEMS Sensitized Structure
title_fullStr The Performance Characterization and Optimization of Fiber-Optic Acoustic Pressure Sensors Based on the MOEMS Sensitized Structure
title_full_unstemmed The Performance Characterization and Optimization of Fiber-Optic Acoustic Pressure Sensors Based on the MOEMS Sensitized Structure
title_short The Performance Characterization and Optimization of Fiber-Optic Acoustic Pressure Sensors Based on the MOEMS Sensitized Structure
title_sort performance characterization and optimization of fiber-optic acoustic pressure sensors based on the moems sensitized structure
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10575427/
https://www.ncbi.nlm.nih.gov/pubmed/37837130
http://dx.doi.org/10.3390/s23198300
work_keys_str_mv AT zhouruling theperformancecharacterizationandoptimizationoffiberopticacousticpressuresensorsbasedonthemoemssensitizedstructure
AT guanchenggang theperformancecharacterizationandoptimizationoffiberopticacousticpressuresensorsbasedonthemoemssensitizedstructure
AT lvhui theperformancecharacterizationandoptimizationoffiberopticacousticpressuresensorsbasedonthemoemssensitizedstructure
AT lishasha theperformancecharacterizationandoptimizationoffiberopticacousticpressuresensorsbasedonthemoemssensitizedstructure
AT lvpuchu theperformancecharacterizationandoptimizationoffiberopticacousticpressuresensorsbasedonthemoemssensitizedstructure
AT qinhaixin theperformancecharacterizationandoptimizationoffiberopticacousticpressuresensorsbasedonthemoemssensitizedstructure
AT chuwenxiu theperformancecharacterizationandoptimizationoffiberopticacousticpressuresensorsbasedonthemoemssensitizedstructure
AT zhouyikai theperformancecharacterizationandoptimizationoffiberopticacousticpressuresensorsbasedonthemoemssensitizedstructure
AT zhangyihao theperformancecharacterizationandoptimizationoffiberopticacousticpressuresensorsbasedonthemoemssensitizedstructure
AT lixiaoqiang theperformancecharacterizationandoptimizationoffiberopticacousticpressuresensorsbasedonthemoemssensitizedstructure
AT zhouruling performancecharacterizationandoptimizationoffiberopticacousticpressuresensorsbasedonthemoemssensitizedstructure
AT guanchenggang performancecharacterizationandoptimizationoffiberopticacousticpressuresensorsbasedonthemoemssensitizedstructure
AT lvhui performancecharacterizationandoptimizationoffiberopticacousticpressuresensorsbasedonthemoemssensitizedstructure
AT lishasha performancecharacterizationandoptimizationoffiberopticacousticpressuresensorsbasedonthemoemssensitizedstructure
AT lvpuchu performancecharacterizationandoptimizationoffiberopticacousticpressuresensorsbasedonthemoemssensitizedstructure
AT qinhaixin performancecharacterizationandoptimizationoffiberopticacousticpressuresensorsbasedonthemoemssensitizedstructure
AT chuwenxiu performancecharacterizationandoptimizationoffiberopticacousticpressuresensorsbasedonthemoemssensitizedstructure
AT zhouyikai performancecharacterizationandoptimizationoffiberopticacousticpressuresensorsbasedonthemoemssensitizedstructure
AT zhangyihao performancecharacterizationandoptimizationoffiberopticacousticpressuresensorsbasedonthemoemssensitizedstructure
AT lixiaoqiang performancecharacterizationandoptimizationoffiberopticacousticpressuresensorsbasedonthemoemssensitizedstructure