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The Performance Characterization and Optimization of Fiber-Optic Acoustic Pressure Sensors Based on the MOEMS Sensitized Structure
In order to investigate the factors affecting the acoustic performance of the extrinsic Fabry–Perot interferometer (EFPI) fiber-optic acoustic pressure sensor and to effectively improve its detection capability, this paper enhances the sensor’s detection sensitivity by adding more sensitized rings t...
Autores principales: | , , , , , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2023
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10575427/ https://www.ncbi.nlm.nih.gov/pubmed/37837130 http://dx.doi.org/10.3390/s23198300 |
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author | Zhou, Ruling Guan, Chenggang Lv, Hui Li, Shasha Lv, Puchu Qin, Haixin Chu, Wenxiu Zhou, Yikai Zhang, Yihao Li, Xiaoqiang |
author_facet | Zhou, Ruling Guan, Chenggang Lv, Hui Li, Shasha Lv, Puchu Qin, Haixin Chu, Wenxiu Zhou, Yikai Zhang, Yihao Li, Xiaoqiang |
author_sort | Zhou, Ruling |
collection | PubMed |
description | In order to investigate the factors affecting the acoustic performance of the extrinsic Fabry–Perot interferometer (EFPI) fiber-optic acoustic pressure sensor and to effectively improve its detection capability, this paper enhances the sensor’s detection sensitivity by adding more sensitized rings to its acoustic pressure-sensitive film. Furthermore, a novel real-time coupled acoustic test method is proposed to simultaneously monitor the changes in the spectral and acoustic metrics of the sensor to characterize its overall performance. Finally, an EFPI-type fiber-optic acoustic pressure sensor was developed based on the Micro-Optical Electro-Mechanical System (MOEMS). The acoustic tests indicate that the optimized fiber-optic acoustic pressure sensor has a sensitivity as high as 2253.2 mV/Pa, and the acoustic overload point (AOP) and signal-to-noise ratios (SNRs) can reach 108.85 dB SPL and 79.22 dB, respectively. These results show that the sensor produced through performance characterization experiments and subsequent optimization has a very high acoustic performance index, which provides a scientific theoretical basis for improving the overall performance of the sensor and will have broad application prospects in the field of acoustic detection. |
format | Online Article Text |
id | pubmed-10575427 |
institution | National Center for Biotechnology Information |
language | English |
publishDate | 2023 |
publisher | MDPI |
record_format | MEDLINE/PubMed |
spelling | pubmed-105754272023-10-14 The Performance Characterization and Optimization of Fiber-Optic Acoustic Pressure Sensors Based on the MOEMS Sensitized Structure Zhou, Ruling Guan, Chenggang Lv, Hui Li, Shasha Lv, Puchu Qin, Haixin Chu, Wenxiu Zhou, Yikai Zhang, Yihao Li, Xiaoqiang Sensors (Basel) Article In order to investigate the factors affecting the acoustic performance of the extrinsic Fabry–Perot interferometer (EFPI) fiber-optic acoustic pressure sensor and to effectively improve its detection capability, this paper enhances the sensor’s detection sensitivity by adding more sensitized rings to its acoustic pressure-sensitive film. Furthermore, a novel real-time coupled acoustic test method is proposed to simultaneously monitor the changes in the spectral and acoustic metrics of the sensor to characterize its overall performance. Finally, an EFPI-type fiber-optic acoustic pressure sensor was developed based on the Micro-Optical Electro-Mechanical System (MOEMS). The acoustic tests indicate that the optimized fiber-optic acoustic pressure sensor has a sensitivity as high as 2253.2 mV/Pa, and the acoustic overload point (AOP) and signal-to-noise ratios (SNRs) can reach 108.85 dB SPL and 79.22 dB, respectively. These results show that the sensor produced through performance characterization experiments and subsequent optimization has a very high acoustic performance index, which provides a scientific theoretical basis for improving the overall performance of the sensor and will have broad application prospects in the field of acoustic detection. MDPI 2023-10-07 /pmc/articles/PMC10575427/ /pubmed/37837130 http://dx.doi.org/10.3390/s23198300 Text en © 2023 by the authors. https://creativecommons.org/licenses/by/4.0/Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/). |
spellingShingle | Article Zhou, Ruling Guan, Chenggang Lv, Hui Li, Shasha Lv, Puchu Qin, Haixin Chu, Wenxiu Zhou, Yikai Zhang, Yihao Li, Xiaoqiang The Performance Characterization and Optimization of Fiber-Optic Acoustic Pressure Sensors Based on the MOEMS Sensitized Structure |
title | The Performance Characterization and Optimization of Fiber-Optic Acoustic Pressure Sensors Based on the MOEMS Sensitized Structure |
title_full | The Performance Characterization and Optimization of Fiber-Optic Acoustic Pressure Sensors Based on the MOEMS Sensitized Structure |
title_fullStr | The Performance Characterization and Optimization of Fiber-Optic Acoustic Pressure Sensors Based on the MOEMS Sensitized Structure |
title_full_unstemmed | The Performance Characterization and Optimization of Fiber-Optic Acoustic Pressure Sensors Based on the MOEMS Sensitized Structure |
title_short | The Performance Characterization and Optimization of Fiber-Optic Acoustic Pressure Sensors Based on the MOEMS Sensitized Structure |
title_sort | performance characterization and optimization of fiber-optic acoustic pressure sensors based on the moems sensitized structure |
topic | Article |
url | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10575427/ https://www.ncbi.nlm.nih.gov/pubmed/37837130 http://dx.doi.org/10.3390/s23198300 |
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