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Super-High-Frequency Bulk Acoustic Resonators Based on Aluminum Scandium Nitride for Wideband Applications

Despite the dominance of bulk acoustic wave (BAW) filters in the high-frequency market due to their superior performance and compatible integration process, the advent of the 5G era brings up new challenges to meet the ever-growing demands on high-frequency and large bandwidth. Al(1-x)Sc(x)N piezoel...

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Detalles Bibliográficos
Autores principales:	Dou, Wentong, Zhou, Congquan, Qin, Ruidong, Yang, Yumeng, Guo, Huihui, Mu, Zhiqiang, Yu, Wenjie
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2023
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10608804/ https://www.ncbi.nlm.nih.gov/pubmed/37887888 http://dx.doi.org/10.3390/nano13202737

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